半导体材料中,离子注入与离子掺杂有什么区别?离子注入技术和离子掺杂工艺的优缺点及其用途?
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![半导体材料中,离子注入与离子掺杂有什么区别?离子注入技术和离子掺杂工艺的优缺点及其用途?](/uploads/image/z/10973816-8-6.jpg?t=%E5%8D%8A%E5%AF%BC%E4%BD%93%E6%9D%90%E6%96%99%E4%B8%AD%2C%E7%A6%BB%E5%AD%90%E6%B3%A8%E5%85%A5%E4%B8%8E%E7%A6%BB%E5%AD%90%E6%8E%BA%E6%9D%82%E6%9C%89%E4%BB%80%E4%B9%88%E5%8C%BA%E5%88%AB%3F%E7%A6%BB%E5%AD%90%E6%B3%A8%E5%85%A5%E6%8A%80%E6%9C%AF%E5%92%8C%E7%A6%BB%E5%AD%90%E6%8E%BA%E6%9D%82%E5%B7%A5%E8%89%BA%E7%9A%84%E4%BC%98%E7%BC%BA%E7%82%B9%E5%8F%8A%E5%85%B6%E7%94%A8%E9%80%94%3F)
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